Nano-Coating Process for Si [1 0 0] Wafer Using Atmospheric Pressure Plasma Jet (APPJ)
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Journal of Modern Physics
سال: 2012
ISSN: 2153-1196,2153-120X
DOI: 10.4236/jmp.2012.39136